Title: COP
CAS Registry Number: 26591-04-8
CAS Name: 2-Methyl-2-propenoic acid oxiranylmethyl ester polymer with ethyl 2-propenoate
Additional Names: poly(glycidyl methacrylate-co-ethyl acrylate); [P(GMA-co-EA)]; glycidyl methacrylate-ethyl acrylate polymer; COP Resist
Line Formula: (C7H10O3.C5H8O2)x
Literature References: Negative electron resist. Prepn and characterization: L. F. Thompson et al., Tech. Pap. Reg. Tech Conf. Soc. Plast. Eng. 1973, (Oct.) 127. Molecular parameters and lithographic performance: L. F. Thompson et al., J. Vac. Sci. Technol. 12, 1280 (1975). Radiation chemistry: E. D. Feit et al., ACS Org. Coat. Plast. Chem. 35, 287 (1975). Use as matrix for deep UV resist materials: C. Kutal, S. K. Weit, J. Coat. Technol. 62, 63 (1990); S. K. Weit et al., Chem. Mater. 4, 453 (1992).
Use: In photosensitive materials as polymer matrix. Photoresist. |